Development of very large helicon plasma source
- 1. Research Institute of Science and Technology, Tokai University, Shibuya-ku, Tokyo 151-8677 (Japan)
- 2. Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580 (Japan)
Description
We have developed a very large volume, high-density helicon plasma source, 75 cm in diameter and 486 cm in axial length; full width at half maximum of the plasma density is up to ∼42 cm with good plasma uniformity along the z axis. By the use of a spiral antenna located just outside the end of the vacuum chamber through a quartz-glass window, plasma can be initiated with a very low value of radio frequency (rf) power (<1 W), and an electron density of more than 1012 cm-3 is successfully produced with less than several hundred Watt; achieving excellent discharge efficiency. It is possible to control the radial density profile in this device by changing the magnetic field configurations near the antenna and/or the antenna radiation-field patterns
Additional details
Identifiers
- DOI
- 10.1063/1.1753089;
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 75
- Journal Issue
- 6
- Journal Page Range
- p. 1941-1946
- ISSN
- 0034-6748
- CODEN
- RSINAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36030600
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- EFFICIENCY; ELECTRON DENSITY; MAGNETIC FIELD CONFIGURATIONS; PLASMA DENSITY; QUARTZ; RADIOWAVE RADIATION; RECTENNAS
- Descriptors DEC
- ANTENNAS; ELECTRICAL EQUIPMENT; ELECTROMAGNETIC RADIATION; EQUIPMENT; MINERALS; OXIDE MINERALS; RADIATIONS
Optional Information
- Notes
- (c) 2004 American Institute of Physics.