Published 2022 | Version v1
Book Metadata-only

Alternative plasma configuration for deposition of films from aluminum acetylacetonate

Creators

  • 1. São Paulo State University (USP) (Brazil). POSMAT
  • 2. Federal University of São Carlos (UNIFESP) (Brazil). PPGCM
  • 3. USP (Brazil). Pós-Graduação em Ciência e Tecnologia dos Materiais
  • 4. Universidade Estadual Paulista Júlio de Mesquita Filho (UNESP), Bauru (Brazil)
  • 5. UNESP (Brazil)
  • 6. UNESP, Sorocaba (Brazil)
  • 7. UNESP (Brazil). Engenharia de Controle e Automação

Description

no abstract available

Part of:
Proceedings of the 20. Brazil MRS Meeting

Additional details

Identifiers

URL
https://www.sbpmat.org.br/20encontro/proceedings/pdfs/plenary/4EXX.pdf;

Publishing Information

Publisher
SBPMat
Imprint Place
Rio de Janeiro, RJ (Brazil)
ISBN
978-85-63273-47-5
Imprint Title
Proceedings of the 20. Brazil MRS Meeting
Imprint Pagination
[1793 p.]
Journal Page Range
1 p.

Conference

Title
20. Brazil MRS Meeting
Dates
25-29 Sep 2022
Place
Foz do Iguacu, PR (Brazil)

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
54082074
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ALUMINIUM OXIDES; ARGON; DEPOSITION; FILMS; PLASMA; SCANNING ELECTRON MICROSCOPY; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
Descriptors DEC
ALUMINIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELEMENTS; FLUIDS; GASES; MICROSCOPY; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; RARE GASES; SCATTERING; SPECTROSCOPY

Optional Information