RBS analysis of deuterium distribution with coincidence detection of recoil particles

A novel analytical method of deuterium depth distribution is presented for a film target with thickness exceeding a few μm. The method is based on the Rutherford Backscattering Spectroscopy (RBS) combined with the Elastic Recoil Detection (ERD). The scattered protons are detected coincidentally with the recoil deuterons to eliminate protons scattered by substrate and impurity atoms. Energy of the coincident protons is then analyzed to deduce the deuterium distribution. Results of proof-of-principle experiments using a deuterated polyethylene film and a deuterium implanted titanium sample are presented, and effect of multiple scattering is discussed. The present method is applicable for targets with thickness of several μm which cannot be reached by conventional heavy-ion ERD using MV accelerators, and has an advantage that we can avoid deformation of hydrogen isotope distribution caused by irradiation of heavy ions