Ion implantation of MeV Au+ into potassium titanyl phosphate

Potassium titanyl phosphate (KTiOPO4 or KTP) was implanted with 1.0 MeV Au+ ions to a fluence of 5x1015 ions cm-2 at room temperature under different angles of incidence. The longitudinal and lateral range profiles, diffusion, damage, surface morphology and structure have been studied by Rutherford backscattering (RBS)/channelling, scanning electron microscopy (SEM) and x-ray diffraction. The results show that (1) the experimental mean projected range is larger than the value predicted by TRIM (transport of ions in matter) by about 15%; (2) the experimental range straggling and lateral spread deviate from the TRIM predictions by around 50 and 20%, respectively; (3) the crystal is completely amorphized in the damaged region; (4) the implanted gold in KTiOPO4 is stable against annealing at 700 deg. C, but diffusion takes place at and above 800 deg. C; (5) the surface morphology is different for virgin and Au+ implanted KTiOPO4. (author)