Structural and Ferroelectric Properties of (K,Na,Li)(Nb,Ta)O₃ - CaZrO₃ Thick Films by Aerosol Deposition

Ferroelectric (1−x)(K0.51Na0.47Li0.02)(Nb0.8Ta0.2)O3 − paraelectric xCaZrO3 solid solution films were deposited on Pt-coated Si substrates by using an aerosol deposition method. The hysteresis and the dielectric properties changed significantly even with small changes in the content of paraelectric CaZrO3. With increasing CaZrO3 content, the ferroelectric phase transformed gradually to a paraelectric phase. With the addition of 3.0 mol% CaZrO3, the dielectric constant was highest; ε33 ∼1100 at 1 kHz with a ferroelectric hysteresis loop. Although the 5.0 mol% of CaZrO3 added film revealed a higher remanent polarization, saturated polarization and coercive field than the 3.0 mol% CaZrO3 added film, the former exhibited an asymmetric polarization - electric field hysteresis loop. The X-ray diffraction confirmed that the ferroelectric to paraelectric phase transition occurred at approximately 3.0 mol% CaZrO3.