Spectroscopic diagnostics of some plasmas used in technology processes

The results are presented of joint spectroscopic studies of technological plasmas performed within the framework of sci-tech cooperation of IPP, Prague and IICMRE, Wroclaw. The plasma spectra were recorded in Prague and analyzed in Wroclaw. In the first experiment a water plasma was generated by the Czechoslovak water-stabilized plasmatron PAL 160. Both a pure water plasma and that with additions of ZrSiO4, Al2O3 and Al powders were investigated. In the second experiment a plasma jet producing a mixed hydrogen-nitrogen-SiCl4 plasma was used. In the first experiment the spectra were recorded on ORWO plates by means of prism spectrograph Q 24. In the second experiment, Kodak plates and planar grating spectrograph PGS-2 were used. (J.U.)