Published December 1, 2018 | Version v1
Journal article

High robustness of epitaxial 4H-SiC graphene to oxidation processes

  • 1. Department of Physics, University of Crete, Heraklion, 71003 (Greece)
  • 2. Research Institute for the Development of Scientific and Educational Potential of Youth, Aviatorov str. 14/55, Moscow, 119620 (Russian Federation)
  • 3. Centre d'elaboration des Materiaux et d'etudes Structurales (CEMES), UPR-8011 CNRS, University of Toulouse, BP 94347, 31055, Toulouse (France)
  • 4. Department of Physics, Chemistry and Biology, Linkoping University, SE-58183, Linkoping (Sweden)
  • 5. Foundation for Research and Technology Hellas (FORTH), P.O. Box 1527, Vassilika Vuton, Heraklion, 71110, Crete, Hellas (Greece)

Description

We present an experimental prove of high robustness of epitaxial 4H-SiC graphene to oxidation processes. During a post-fabrication cleaning procedure we noticed that epitaxial graphene is extremely stable to ozone treatment. We analyse graphene properties using both electron transport measurements and numerical calculations. We ascribe this effect to the substrate topography, which significantly affects the graphene stability under UV/ozone treatment. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1124/8/081020

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1124
Journal Issue
8
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
5. International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures
Acronym
Saint Petersburg OPEN 2018
Dates
2-5 Apr 2018
Place
Saint Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53021483
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY; S74: ATOMIC AND MOLECULAR PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRONS; EPITAXY; GRAPHENE; OXIDATION; OZONE; SILICON CARBIDES; SUBSTRATES
Descriptors DEC
CARBIDES; CARBON; CARBON COMPOUNDS; CHEMICAL REACTIONS; CRYSTAL GROWTH METHODS; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; LEPTONS; NONMETALS; SILICON COMPOUNDS