Published 1992
| Version v1
Miscellaneous
Peculiarities of defect accumulation beyond the ion projected range as a function of energy, irradiation dose and temperature
Creators
- 1. Khar'kovskij Gosudarstvennyj Univ., Kharkov (Ukraine)
- 2. Khar'kovskij Politekhnicheskij Inst., Kharkov (Ukraine)
Description
Precise X-ray diffractometry, transmission electron microscopy and ''in situ'' resistivity measurements in an implanter were used to study radiation damage in epitaxial Ti-films during 1 to 20 keV He+ implantation up to fluences of 5 · 1016 cm-2 in the temperature range from 100 K to 293 K. The kinetics of radiation defect accumulation were investigated both within the layer of projectile penetration range and beyond it
Additional details
Additional titles
- Original title (Russian)
- Особенности накопления дефектов за пределами слоя проективных пробегов ионов в зависимости от энергии, дозы и температуры облучения
Publishing Information
- Imprint Title
- Physics of radiation damage and radiation materials technology
- Imprint Pagination
- 150 p.
- Journal Volume
- 1-2
- Journal Issue
- 58-59
- Series
- Voprosy atomnoj nauki i tekhniki. Fizika radiatsionnykh povrezhdenij i radiatsionnoe materialovedenie.
- Journal Page Range
- p. 12-17.
- ISSN
- 0134-5400
- Report number
- INIS-UA--006
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 26032519
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- CRYSTAL DEFECTS; ELECTRON MICROSCOPY; FILMS; HELIUM IONS; ION IMPLANTATION; KEV RANGE 01-10; KEV RANGE 10-100; OXYGEN; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; SUBSTRATES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0065-0273 K; TITANIUM; X-RAY DIFFRACTION
- Descriptors DEC
- CHARGED PARTICLES; COHERENT SCATTERING; CRYSTAL STRUCTURE; DIFFRACTION; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; MICROSCOPY; NONMETALS; RADIATION EFFECTS; SCATTERING; TEMPERATURE RANGE; TRANSITION ELEMENTS
Optional Information
- Notes
- Imprint:Fizika radiatsionnykh povrezhdenij i radiatsionnoe materialovedenie.