Published March 1, 1999
| Version v1
Journal article
Comment on 'Gettering of Cu by He-induced cavities in SIMOX materials' [Nucl. Instr. and Meth. B 134 (1998) 360]
Creators
- 1. Institut fuer Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, Postfach 510119, D-01314 Dresden (Germany)
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 149
- Journal Issue
- 4
- Journal Page Range
- p. 445-446
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Belarus
- INIS RN
- 31064278
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- COPPER; GETTERING; HELIUM IONS
- Descriptors DEC
- CHARGED PARTICLES; ELEMENTS; IONS; METALS; TRANSITION ELEMENTS