Published October 1, 2010
| Version v1
Journal article
Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering
- 1. Department of Engineering and System Science National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan (China)
- 2. Instrument Technology Research Center, 20 R and D Road VI, Hsinchu Science-Based Industrial Park, Hsinchu 300, Taiwan (China)
- 3. Institute of Nuclear Engineering and Science National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan (China)
Description
The effect of nitrogen flow rate on structure and properties of (Ti,Zr)N thin films was investigated in the study. Two types of (Ti,Zr)N thin films were found with different nitrogen flow rates, one is the single-phase solid solution of (Ti,Zr)N that appeared for nitrogen flow rates of 2-7 sccm, the other one is the phase of both (Ti,Zr)N and TiZr mixture for the lower nitrogen flow rates of 1 sccm. The grain size of the films was also determined by X-ray diffraction, and the size was less than 20 nm. The (Ti,Zr)N films show excellent hardness ranging from 35.5 to 37.5 GPa with exhibiting (111) preferred orientation.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2010.04.099Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2010.04.099;
- PII
- S0040-6090(10)00632-2;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 518
- Journal Issue
- 24
- Journal Page Range
- p. 7308-7311
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- Taiwan Association for Coatings and Thin Films Technology international thin films conference
- Acronym
- TACT 2009
- Dates
- 14-16 Dec 2009
- Place
- Taipei, Taiwan (China)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42067115
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- FLOW RATE; GRAIN ORIENTATION; GRAIN SIZE; HARDNESS; MAGNETRONS; NANOSTRUCTURES; NITROGEN; NITROGEN ADDITIONS; PRESSURE RANGE GIGA PA; RADIOWAVE RADIATION; SOLID SOLUTIONS; SPUTTERING; THIN FILMS; TITANIUM ALLOYS; X-RAY DIFFRACTION; ZIRCONIUM ALLOYS
- Descriptors DEC
- ALLOYS; COHERENT SCATTERING; DIFFRACTION; DISPERSIONS; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; HOMOGENEOUS MIXTURES; MECHANICAL PROPERTIES; MICROSTRUCTURE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MIXTURES; NONMETALS; ORIENTATION; PRESSURE RANGE; RADIATIONS; SCATTERING; SIZE; SOLUTIONS; TRANSITION ELEMENT ALLOYS
Optional Information
- Copyright
- Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.