Published June 2005 | Version v1
Journal article

NanoESCA: imaging UPS and XPS with high energy resolution

  • 1. FOCUS GmbH, Am Birkhecker Berg 20, 65510 Huenstetten (Germany)
  • 2. OMICRON Nanotechnology GmbH, 65232 Taunusstein (Germany)
  • 3. Universitaet des Saarlandes, FR 7.2. Experimentalphysik, 66041 Saarbruecken (Germany)
  • 4. Experimentelle Physik II, Universitaet Wuerzburg, Am Hubland, 97074 Wuerzburg (Germany)
  • 5. Johannes Gutenberg Universitaet, Institut fuer Physik, Staudinger Weg 7, 55128 Mainz (Germany)

Description

A novel imaging electron spectrometer has been used for laterally resolved ultraviolet photoelectron spectroscopy (UPS) and X-ray photoelectron spectroscopy (XPS) in the soft X-ray range. The instrument is based on a high-resolution emission microscope optics using a cathode lens and an imaging dispersive analyser. The analyser is corrected for the leading aberration term (α 2-term) by means of two hemispherical analysers in antisymmetric configuration with an appropriate transfer lens. Small-area spectra as well as energy-filtered images have been taken in the soft X-ray range for a meteorite sample and in the range of the d-band of a Cu polycrystal. An energy resolution of 106 meV along with a high spatial resolution allows a detailed analysis of trace elements in the meteorite sample as well as local UPS spectra of the surface of the Cu sample

Additional details

Identifiers

DOI
10.1016/j.elspec.2005.01.250;
PII
S0368-2048(05)00035-6;

Publishing Information

Journal Title
Journal of Electron Spectroscopy and Related Phenomena
Journal Volume
144-147
Journal Page Range
p. 1179-1182
ISSN
0368-2048
CODEN
JESRAW

Conference

Title
14. international conference on vacuum ultraviolet radiation physics
Acronym
VUV 14
Dates
19-23 Jul 2004
Place
Cairns (Australia)

Optional Information

Copyright
Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.