Published 1995 | Version v1
Journal article

Electron-assisted chemical vapour deposition of BN

Creators

  • 1. Politechnika Warszawska, Warsaw (Poland)

Description

The paper presents the methods of crystallization of metastable types of boron nitride from gaseous phase. It was shown proved that in the synthesis process of metastable of BN charged particles played an essential part. It was stated that the particles charged negatively, with ions and electrons, have an important meaning. (author). 6 refs, 1 fig., 1 tabs

Additional details

Additional titles

Original title (Polish)
Otrzymywanie warstw BN z fazy gazowej z udzialem reakcji chemicznej wspomaganej elektronami

Publishing Information

Journal Title
Problemy Eksploatacji
Journal Volume
18
Journal Issue
5
Journal Page Range
p. 181-185.
ISSN
1232-9312

Conference

Title
Surface Engineering'95.
Original Conference Title
Ogolnopolska Konferencja Naukowa: Inzynieria Powierzchni'95
Acronym
National Scientific Conference
Dates
1995.
Place
Radom (Poland).

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
28067056
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BORON NITRIDES; CHEMICAL VAPOR DEPOSITION; CUBIC LATTICES; ELECTRON BEAMS; MEETINGS; PHASE STUDIES
Descriptors DEC
BEAMS; BORON COMPOUNDS; CHEMICAL COATING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; DEPOSITION; LEPTON BEAMS; NITRIDES; NITROGEN COMPOUNDS; PARTICLE BEAMS; PNICTIDES; SURFACE COATING