Published 2001
| Version v1
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Sputtering of amorphous Ge by Ar ions with the energy of 0.1-100 keV
Description
no abstract available
Files
34049150.pdf
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Additional details
Additional titles
- Original title (Russian)
- Распыление аморфного Ге ионами Ар с энергией 0.1-100 кэв
Publishing Information
- Publisher
- MGU
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Theses of reports of 31. International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 160 p.
- Journal Page Range
- p. 68
- Report number
- INIS-RU--463
Conference
- Title
- 31. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- 31. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 28-30 May 2001
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 34049150
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- AMORPHOUS STATE; ANGULAR DISTRIBUTION; ARGON 38 BEAMS; COMPUTERIZED SIMULATION; ENERGY SPECTRA; GERMANIUM; KEV RANGE; SPUTTERING
- Descriptors DEC
- BEAMS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; ION BEAMS; METALS; SIMULATION; SPECTRA
Optional Information
- Notes
- 2 refs. Imprint:Tezisy dokladov 31. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami