Stability of methods indirect doze measurements of ion implantation

The method of successive approximations investigates problems of the account of initial technological dispersion in structures used in the field of indirect doze measurements of ion implantation. An essential singularity of an offered method is the capability of clarification of distribution of a doze D on some step at the expense of use of similar distribution on the previous step. The convergence of this algorithm is equivalent to fulfilment of a number of analytical conditions, which essence is reduced that sensitivity of parameter of a doze Π to the reference value On can be though also high, but it is necessary slow change function from Πo, D. The use of approximate approximating of a calibration curve reflecting only character of actual dependence Π(D) suffices for the conclusion of rather technological stability of a method indirect doze measurements. The example of a unstable method based on the phenomenon of an optical interference is resulted