Published 2000
| Version v1
Miscellaneous
Ultrasonic transducer realized with synchrotron radiation lithography
Creators
- 1. Harima Research Laboratories, Sumitomo Electric Industries Ltd., Kamigori, Hyogo (Japan)
Description
A ceramics micro fabrication technique has been developed for the 1-3 piezocomposite which is suitable for high frequency, wideband ultrasound transducers. This process employs synchrotron radiation (SR) lithography and a micro molding process, generally called the 'LIGA process'. This process realized an array of lead zirconate titanate (PZT) rods whose cross section is 25 micron. The piezocomposite was clarified as having predicted merits and was thought to contribute to the improvement of the resolution. (author)
Additional details
Publishing Information
- Imprint Title
- Proceedings of international symposium on prospects for application of radiation towards the 21st century
- Imprint Pagination
- 192 p.
- Journal Page Range
- p. 91-92
Conference
- Title
- International symposium on prospects for application of radiation towards the 21st century
- Dates
- 13-17 Mar 2000
- Place
- Tokyo (Japan)
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 32042006
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- ABLATION; CASTING; CERAMICS; INTEGRATED CIRCUITS; MATERIALS WORKING; MOLDING; PIEZOELECTRICITY; PZT; SYNCHROTRON RADIATION; TRANSDUCERS; ULTRASONIC WAVES
- Descriptors DEC
- BREMSSTRAHLUNG; ELECTRICITY; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; FABRICATION; LEAD COMPOUNDS; MICROELECTRONIC CIRCUITS; OXYGEN COMPOUNDS; RADIATIONS; SOUND WAVES; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS
Optional Information
- Notes
- 4 refs., 3 figs.