Published August 1992 | Version v1
Journal article Metadata-only

High efficiency metal ion source

Creators

  • 1. Tokai Univ., Hiratsuka, Kanagawa (Japan). Dept. of Physics
  • 2. Tokai Univ., Hiratsuka, Kanagawa (Japan). Inst. of Research and Development

Description

A double hollow cathode ion source can produce a high amount and high current density of metal ions (Mo) by using a new sputtering discharge mode of hollow cathode discharge. It is evident that the new sputtering discharge mode occurs under suitable conditions of the diameter of the second hollow cathode and the magnetic field. At a sputter voltage of 600 V and magnetic field of 1.0 kG, the metal ion beam ratio α reaches ∝ 50%. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B
Journal Volume
70
Journal Issue
1-4
Journal Page Range
p. 205-207.
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
12. international conference on electromagnetic isotope separators and technique related to their applications (EMIS-12).
Dates
2-6 Sep 1991.
Place
Sendai (Japan).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
24015424
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
EFFICIENCY; ELECTRIC DISCHARGES; EXPERIMENTAL DATA; HOLLOW CATHODES; ION SOURCES; MAGNETIC FIELDS; MOLYBDENUM IONS; SPUTTERING
Descriptors DEC
CATHODES; CHARGED PARTICLES; DATA; ELECTRODES; INFORMATION; IONS; NUMERICAL DATA