The experimental sputtering angular distribution of Cu-Au alloy with 27 keV oblique incident Ar+ ion beam

The angular distributions of sputtered Cu and Au atoms have been measured under normal and oblique incidence bombardment with 27 keV Ar+ for Cu-Au (30 wt%) alloy. Sputtering material on Al collector has been analysed by RBS technique. The resuts indicate that copper atoms are ejected preferentially under oblique incidence bombardment (θT = 40 deg) and the preferential ratio for oblique incidence is higher than that for normal incidence (θT = 0 deg). From the angular distributions of sputtered copper atoms the ejection probability in the ejected angle region between 0 deg and 45 deg for oblique incidence is found to be lower than that for normal incidence