Published May 1988 | Version v1
Journal article

Influence of neutron irradiation and annealing on the properties of germanium-doped silicon

  • 1. Institute of Problems of Technology of Microelectronics and Ultrapure Materials, Chernogolovka (USSR)

Description

An investigation was made of the influence of irradiation with large neutron doses and of isochronous annealing (200-750 degree C) on the optical and structural properties of Si doped with Ge. The presence of Ge in Si (particularly in high concentrations) slowed down generation of divacancies and altered the nature of their annealing, slowed down the annealing of the defects responsible for the edge absorption and deformation peak of irradiated Si, and also slowed down generation of superclusters formed as a result of irradiation and annealing

Additional details

Publishing Information

Journal Title
Soviet Physics - Semiconductors (English Translation)
Journal Volume
22
Journal Issue
5
Series
Sov. Phys. - Semicond. (Engl. Transl.).
Journal Page Range
526-529
ISSN
0038-5700
CODEN
SPSEA

Optional Information

Notes
Cover-to-cover translation of Fizika i Tekhnika Poluprovodnikov (USSR).