Published 2002
| Version v1
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Tungsten nitride films grown via pulsed laser deposition studied in-situ by electron spectroscopies
- 1. Centro de Ciencias de la Materia Condensada, UNAM, Ensenada, Baja California (Mexico)
Description
no abstract available
Availability note (English)
Available from INIS in electronic formFiles
34009308.pdf
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(5.5 kB)
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Additional details
Publishing Information
- Imprint Pagination
- 1 p.
- Report number
- INIS-MX--1166
Conference
- Title
- International Materials Research Congress Cancun 2002
- Dates
- 25-29 Aug 2002
- Place
- Cancun (Mexico)
INIS
- Country of Publication
- Mexico
- Country of Input or Organization
- Mexico
- INIS RN
- 34009308
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ABLATION; BINDING ENERGY; LASER RADIATION; MICROELECTRONICS; SILICON; STOICHIOMETRY; SUBSTRATES; SURFACE COATING; TUNGSTEN NITRIDES; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- COATINGS; DEPOSITION; ELECTROMAGNETIC RADIATION; ELEMENTS; ENERGY; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATIONS; REFRACTORY METAL COMPOUNDS; SEMIMETALS; TRANSITION ELEMENT COMPOUNDS; TUNGSTEN COMPOUNDS