Quantification of dominant diffusion processes through plasma enhanced chemical vapor deposition-coated plastics by combining two complementary methods for porosity analysis

Thin plasma polymerized gas barrier coatings were applied on PET films using low-pressure microwave excited hexamethyldisiloxane plasma. Oxygen and water vapor transmission rates were determined for the same barrier coating of varying thickness and correlated with the coating porosity. The porosity was quantified on different scales with two complementary methods. A plasma etching process with subsequent high-resolution SEM imaging and an automated defect detection as well as an overall porosity measurement by means of cyclic voltammetry. This method combination can be used to assign and classify Knudsen diffusion and Knudsen diffusion for different coatings and defect distributions applied. Film growing process could be observed with correlating defect distributions and it could be determined that almost no macro defects with a radius r_d > 150 nm are present while growing process. With visually closed coatings, the entire oxygen and water vapor permeation could be attributed to Knudsen and solid body diffusion, although it is difficult to divide the proportions of these two processes. (paper)