Study of a micro chamber quadrupole mass spectrometer
Creators
- 1. Jiangsu Information Display Engineering Research Center, School of Electronic Science and Engineering, Southeast University, Nanjing 210096 (China)
Description
The design of a micro chamber quadrupole mass spectrometer (MCQMS) having a small total volume of only 20 cm3, including Faraday cup ion detector and ion source, is described. This MCQMS can resist a vacuum baking temperature of 400-500 deg. C. The quadrupole elements with a hyperbolic surface are made of a ceramic material and coated with a thin metal layer. The quadrupole mass filter has a field radius of 3 mm and a length of 100 mm. Prototypes of this new MCQMS can detect a minimum partial pressure of 10-8 Pa, have a peak width of ΔM=1 at 10% peak height from mass number 1 to 60, and show an excellent long-term stability. The new MCQMS is intended to be used in residual gas analyses of electron devices during a mutual pumping and baking process
Additional details
Identifiers
- DOI
- 10.1116/1.2827512;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 26
- Journal Issue
- 2
- Journal Page Range
- p. 239-243
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40006725
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- CERAMICS; DESIGN; ELECTRONS; EQUIPMENT; FARADAY CUPS; FILTERS; GAS ANALYSIS; HEIGHT; ION SOURCES; IONS; LAYERS; MASS NUMBER; MASS SPECTROMETERS; METALS; PARTIAL PRESSURE; PEAKS; QUADRUPOLES; WIDTH
- Descriptors DEC
- BEAM MONITORS; CHARGED PARTICLES; DIMENSIONS; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; LEPTONS; MEASURING INSTRUMENTS; MONITORS; MULTIPOLES; PHYSICAL PROPERTIES; SPECTROMETERS; THERMODYNAMIC PROPERTIES
Optional Information
- Notes
- (c) 2008 American Vacuum Society