Published April 1, 1981 | Version v1
Journal article Metadata-only

Measurement of thin aluminium layers on silicon

Creators

  • 1. Zentralinstitut fuer Isotopen- und Strahlentechnik, Leipzig (German Democratic Republic)

Description

The thickness of a surface layer with an atomic number adjacent to that of the backing material was determined by particle induced X-ray emission (PIXE) analysis. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods
Journal Volume
180
Journal Issue
2/3
Series
Nucl. Instrum. Methods.
Journal Page Range
663-665
ISSN
0029-554X

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
12630045
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
ALUMINIUM; LAYERS; SILICON; THICKNESS GAGES; TRACE AMOUNTS; X-RAY EMISSION ANALYSIS; X-RAY SPECTROSCOPY
Descriptors DEC
CHEMICAL ANALYSIS; ELEMENTS; MEASURING INSTRUMENTS; METALS; NONDESTRUCTIVE ANALYSIS; SEMIMETALS; SPECTROSCOPY

Optional Information

Notes
Letter-to-the-editor.