Simulations of CMOS pixel sensors with a small collection electrode, improved for a faster charge collection and increased radiation tolerance
Creators
- 1. CERN, Geneva 23 (Switzerland)
- 2. University of Geneva, Geneva 4 (Switzerland)
- 3. TowerJazz Semiconductor, Migdal Haemek, 23105 (Israel)
Description
CMOS pixel sensors with a small collection electrode combine the advantages of a small sensor capacitance with the advantages of a fully monolithic design. The small sensor capacitance results in a large ratio of signal-to-noise and a low analogue power consumption, while the monolithic design reduces the material budget, cost and production effort. However, the low electric field in the pixel corners of such sensors results in an increased charge collection time, that makes a fully efficient operation after irradiation and a timing resolution in the order of nanoseconds challenging for pixel sizes larger than approximately forty micrometers. This paper presents the development of concepts of CMOS sensors with a small collection electrode to overcome these limitations, using three-dimensional Technology Computer Aided Design simulations. The studied design uses a 0.18 μm process implemented on a high-resistivity epitaxial layer.
Availability note (English)
Available from http://dx.doi.org/10.1088/1748-0221/14/05/C05013Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Instrumentation
- Journal Volume
- 14
- Journal Issue
- 05
- Journal Page Range
- p. C05013
- ISSN
- 1748-0221
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 51050588
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- BUDGETS; CAPACITANCE; CHARGE COLLECTION; COMPUTER-AIDED DESIGN; ELECTRIC FIELDS; ELECTRODES; EPITAXY; IRRADIATION; LAYERS; NOISE; OPERATION; RESOLUTION; SENSORS; SIGNALS; SIMULATION; THREE-DIMENSIONAL CALCULATIONS; TOLERANCE
- Descriptors DEC
- CRYSTAL GROWTH METHODS; DESIGN; ELECTRICAL PROPERTIES; PHYSICAL PROPERTIES