Published 1989 | Version v1
Journal article Metadata-only

Electrical properties of Al-Mn amorphous films formed by ion beam mixing

Creators

  • 1. Wulhan Univ. (China). Dept. of Physics

Description

Alternating Al-Mn layers are deposited onto the substrates which are placed on a variable temperature target of a 200 keV implanter. The multilayered films are amorphized by a room temperature Ar+ beam irradiation. The electrical resistivity of the samples and their relation to ion beam dose and temperature are measured in situ. TEM observation indicates the presence of the amorphous phase. (author)

Additional details

Publishing Information

Journal Title
Vacuum
Journal Volume
39
Journal Issue
2-4
Series
Vacuum.
Journal Page Range
251-253
ISSN
0042-207X
CODEN
VACUA

Conference

Title
international symposium on applications of ion beams produced by small accelerators.
Acronym
Ion beam interactions with matter
Dates
20-24 Oct 1987.
Place
Jinan (China).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
20053921
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM ALLOYS; AMORPHOUS STATE; ARGON IONS; BACKSCATTERING; ELECTRIC CONDUCTIVITY; FILMS; ION IMPLANTATION; ION SOURCES; KEV RANGE 100-1000; LAYERS; MANGANESE ALLOYS; MEDIUM TEMPERATURE; RADIATION DOSES; SUBSTRATES; TEMPERATURE DEPENDENCE; TRANSMISSION ELECTRON MICROSCO
Descriptors DEC
ALLOYS; CHARGED PARTICLES; ELECTRICAL PROPERTIES; ELECTRON MICROSCOPY; ENERGY RANGE; IONS; KEV RANGE; MICROSCOPY; PHYSICAL PROPERTIES; SCATTERING