Published April 1, 2021 | Version v1
Journal article

Micro-arc method for the synthesis of silicon nanostructures

  • 1. KNRTU–KAI, Kazan (Russian Federation)

Description

This paper presents the results of plasma synthesis of silicon nanostructures in an air-argon medium. The synthesis of silicon nanostructures was carried out in a vacuum chamber at a gas mixture pressure of 500 Torr, with partial pressures of argon and air in the ratio of 4:1. Molybdenum and silicon embedded in a copper tube were used as electrodes. Current and voltage were maintained in the range of 8-25 A and 30-50 V, corresponding. As a result of experiments, silicon nanostructures were deposited on the surface of the electrodes. Nanostructures were studied by optical and electron microscopes. Forms of silicon nanostructures were mainly in the form of nanotubes. Their diameters range from 200 nm to 500 nm, and their length reaches 1 mm. On the surface of these nanotubes, nanovilli with a diameter of about 5 nm and a length of 100 nm are observed. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1870/1/012012

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1870
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
1. All-Russian with international participation conference on gas discharge plasma and synthesis of nanostructures
Dates
2-5 Dec 2020
Place
Kazan (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
54098460
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON; COPPER; DEPOSITS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON MICROSCOPES; MOLYBDENUM; NANOTUBES; PARTIAL PRESSURE; PLASMA; SILICON; SURFACES
Descriptors DEC
ELEMENTS; FLUIDS; GASES; METALS; MICROSCOPES; NANOSTRUCTURES; NONMETALS; PHYSICAL PROPERTIES; RARE GASES; REFRACTORY METALS; SEMIMETALS; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENTS