Study on the high voltage terminals signals of the ion source sampling and its measuring circuit

In electrical parameter measurement of ion source, the anti-interference ability of sampling and isolation part of high voltage terminal's signals is very important because of the complex environment and lots of interference sources in locale. It affects accuracy of the result directly. It takes the measurement of Arc Voltage (Varc) for example, designs a sampling circuit with parallel Resistors and capacitors, Using coaxial cable to achieve isolation, Using differential input mode to Reduce noise, which can bring signals of low-distortion after sampling and isolation. (authors)