Published 2017 | Version v1
Book Metadata-only

Development of magnetron sputtering systems

Creators

  • 1. IATEh NIYaU MIFI, Obninsk (Russian Federation)

Description

no abstract available

Part of:
Future of nuclear power. XII International scientific-practical conference of students, postgraduates and young professionals. Summaries of reports

Additional details

Additional titles

Original title (Russian)
Разработка магнетронных напылительных систем

Publishing Information

Publisher
IATEh NIYaU MIFI
Imprint Place
Obninsk (Russian Federation)
ISBN
978-5-7262-2386-5
Imprint Title
Future of nuclear power. XII International scientific-practical conference of students, postgraduates and young professionals. Summaries of reports
Imprint Pagination
278 p.
Journal Page Range
p. 229-230

Conference

Title
Future of nuclear power. 12. International scientific-practical conference of students, postgraduates and young professionals
Original Conference Title
Budushchee atomnoj ehnergetiki. XII Mezhdunarodnaya nauchno-prakticheskaya konferentsiya studentov, aspirantov i molodykh spetsialistov
Dates
23-25 Nov 2016
Place
Obninsk (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
50056078
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
MAGNETRON ION SOURCES; MAGNETRONS; MATHEMATICAL MODELS; NANOSTRUCTURES; NANOTECHNOLOGY; SPUTTERING
Descriptors DEC
ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; ION SOURCES; MICROWAVE EQUIPMENT; MICROWAVE TUBES; PLASMA ION SOURCES

Optional Information

Notes
1 ref. Imprint:Budushchee atomnoj ehnergetiki. XII Mezhdunarodnaya nauchno-prakticheskaya konferentsiya studentov, aspirantov i molodykh spetsialistov. Tezisy dokladov