Published May 1, 1988 | Version v1
Journal article

Thermal behavior and range distribution of 209Bi implanted into the Al/V bilayer structure

  • 1. Instituto de Fisica, Universidade Federal do Rio Grande do Sul, 90049 Porto Alegre, RS, Brazil

Description

350-keV 209Bi+ was implanted into an Al (1000 A)/V bilayer system. The Bi depth distribution measured by Rutherford backscattering agrees well with predictions obtained via the Monte-Carlo simulation method (trIm code). Diffusion coefficients for Bi in both the V substrate of the Al/V system and the pure V foil are extracted after thermal annealings in a temperature range between 200 and 700 0C. The results show that the Bi ions follow a hindered diffusion at the Al film of the Al/V bilayer and for temperatures higher than 580 0C diffuse regularly in the V bulk

Additional details

Publishing Information

Journal Title
J. Appl. Phys.
Journal Volume
63
Journal Issue
9
Series
J. Appl. Phys.
Journal Page Range
4431-4434
ISSN
0021-8979
CODEN
JAPIA