Domain switching and spatial dependence of permittivity in ferroelectric thin films
- 1. National Semiconductor Corporation, Santa Clara, California 95052-8090 (United States)
- 2. Department of Electrical and Computer Engineering, University of Arizona, Tucson, Arizona 85721 (United States)
- 3. Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, Tennessee 37235 (United States)
- 4. Department of Materials Science and Engineering, University of Arizona, Tucson, Arizona 85721 (United States)
Description
A domain model consistent with the measured capacitance endash voltage (CV) characteristics of lead zirconate titanate (PZT) capacitors is proposed. Two variants of this model are presented and compared with experimentally measured CV data. The basic model is developed adopting a macroscopic electric field that is spatially uniform through the depth of the film. Then, this model is generalized to allow a variation of the electric field with depth and to include a physically reasonable, position-dependent domain structure. Specifically, the spatial variation of the electric field is related to dopant endash ion charges. As a result of the interaction between the domain properties and the electrical doping, a position dependent permittivity is induced, and the electrical properties of the capacitors are affected. Finally, computer simulations to fit the measured CV characteristics are performed to help understand the extent of the coupling between the domain properties and the electrical doping. It is found that there is a minimum doping level below which the doping does not affect the CV characteristic. A method for determining this minimum doping level from the CV curve is presented. The analysis of observed CV data demonstrates that niobium doping is responsible for partially compensating the p-type nature of PZT thin films. For the films measured here, the minimum noticeable doping level is about 1018cm-3. It is also found that niobium doping slows the growth rate of polarization as the electric field increases, and has a tendency to increase the coercive field. copyright 1997 American Institute of Physics
Additional details
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 82
- Journal Issue
- 5
- Journal Page Range
- p. 2505-2516.
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 29008009
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- CAPACITORS; DOMAIN STRUCTURE; DOPED MATERIALS; ELECTRIC FIELDS; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; NIOBIUM ADDITIONS; PERMITTIVITY; POLARIZATION; PZT; THIN FILMS
- Descriptors DEC
- DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; ENERGY STORAGE SYSTEMS; EQUIPMENT; FILMS; MATERIALS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS