Published February 12, 2006
| Version v1
Journal article
Sputtered targets made from fluorine compounds for fabrication of thin superconducting films
- 1. Belorusskij Natsional'nyj Tekhnicheskij Univ., Minsk (Belarus)
Description
A new method has been developed for the preparation of sputtered targets from a mixture of fluoride compounds within high-Tc superconductors (HTSC). The physicomechanical properties of the proposed targets, the parameters of their magnetron sputtering and the electrophysical properties of the obtained HTSC films have been studied. It has been established that the YBaCuO films obtained by the magnetron sputtering of YF3-BaF2-Cu targets exhibit stable transition into the superconducting state at 82 K, with the phase transition width not exceeding 3 degrees
Abstract (Russian)
Разработан способ формирования распыляемых мишеней из фторидных соединений элементов, входящих в состав тонких пленок высокотемпературных сверхпроводников (ВТСП). Изучены физико-механические характеристики разработанных мишеней, параметры процесса их магнетронного распыления и электрофизические свойства получаемых ВТСП-пленок. Установлено, что пленки YBaCuO, полученные из мишеней YF3-BaF2-Сu, стабильно переходят в сверхпроводящее состояние при температуре 82 К, причем ширина перехода не превышает 3 градусовAdditional details
Additional titles
- Original title (Russian)
- Распыляемые мишени из фторидных соединений для получения тонких пленок высокотемпературных сверхпроводников
Publishing Information
- Journal Title
- Pis'ma v Zhurnal Tekhnicheskoj Fiziki
- Journal Volume
- 32
- Journal Issue
- 4
- Journal Page Range
- p. 45-50
- ISSN
- 0320-0116
- CODEN
- PZTFDD
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38046672
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; BARIUM FLUORIDES; CONCENTRATION RATIO; CUPRATES; DIAGRAMS; FABRICATION; HIGH-TC SUPERCONDUCTORS; MICROSTRUCTURE; POWDERS; SPUTTERING; SUPERCONDUCTING FILMS; THIN FILMS; YTTRIUM FLUORIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; COPPER COMPOUNDS; DIMENSIONLESS NUMBERS; FILMS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HEAT TREATMENTS; INFORMATION; OXYGEN COMPOUNDS; SUPERCONDUCTORS; TRANSITION ELEMENT COMPOUNDS; TYPE-II SUPERCONDUCTORS; YTTRIUM COMPOUNDS
Optional Information
- Notes
- 1 ref., 2 figs.