Published October 2008 | Version v1
Journal article

The fabrication of a microcolumn for gas separation using poly(dimethylsiloxane) as the structural and functional material

  • 1. Institute of Microelectronics-NCSR ''Demokritos'' POB 60228, 153 10 Aghia Paraskevi, Attiki (Greece)

Description

The fabrication and performance of a microcolumn made of poly(dimethylsiloxane) (PDMS) for gas separation is presented. PDMS is a material commonly used as a stationary phase in large-scale chromatography systems, while in this work it serves both as the structural material of the microcolumn as well as a stationary phase enabling gas mixture separation by different absorption and desorption kinetics of the sample components on the column walls. Gas separation is demonstrated for a xylene/benzene vapor mixture at different ratios detected by means of a VOC sensor connected at the exit of the microcolumn. The effect of the microcolumn depth and working temperature on the separation performance of the microcolumn is investigated

Availability note (English)

Available from http://dx.doi.org/10.1088/0960-1317/18/10/105007

Additional details

Identifiers

DOI
10.1088/0960-1317/18/10/105007;
PII
S0960-1317(08)78628-5;

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering. Structures, Devices and Systems
Journal Volume
18
Journal Issue
10
Journal Page Range
[6 p.]
ISSN
0960-1317
CODEN
JMMIEZ

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44095662
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ABSORPTION; BENZENE; CHROMATOGRAPHY; DEPTH; DESORPTION; FABRICATION; MIXTURES; PERFORMANCE; SENSORS; TEMPERATURE DEPENDENCE; VAPORS; VOLATILE MATTER; XYLENES
Descriptors DEC
ALKYLATED AROMATICS; AROMATICS; DIMENSIONS; DISPERSIONS; FLUIDS; GASES; HYDROCARBONS; MATTER; ORGANIC COMPOUNDS; SEPARATION PROCESSES; SORPTION