Published 2009 | Version v1
Book

Design and development of fluidized bed reactor system for production of trichlorosilane as a precursor for high purity silicon

  • 1. Heavy Water Div., Bhabha Atomic Research Centre, Mumbai (India)

Description

Trichlorosilane is widely used as precursor material for production of high purity silicon. It is mainly produced by reaction of metallurgical grade silicon with anhydrous HCl gas in a fluidized bed reactor. To develop this process on commercial scale a pilot size fluidized bed reactor system was designed and developed and successfully operated. This paper discusses the critical issues related to these activities. (author)

Part of:
Proceedings of the national symposium on growth of detector-grade single crystals

Additional details

Publishing Information

Publisher
Bhabha Atomic Research Centre
Imprint Place
Mumbai (India)
ISBN
978-81-8372-053-6
Imprint Title
Proceedings of the national symposium on growth of detector-grade single crystals
Imprint Pagination
191 p.
Journal Page Range
p. 131-132

Conference

Title
national symposium on growth of detector-grade single crystals
Acronym
NSGDSC-2009
Dates
19-21 Nov 2009
Place
Mumbai (India)

Optional Information

Notes
2 refs., 2 figs.