Published 2009
| Version v1
Book
Design and development of fluidized bed reactor system for production of trichlorosilane as a precursor for high purity silicon
- 1. Heavy Water Div., Bhabha Atomic Research Centre, Mumbai (India)
Description
Trichlorosilane is widely used as precursor material for production of high purity silicon. It is mainly produced by reaction of metallurgical grade silicon with anhydrous HCl gas in a fluidized bed reactor. To develop this process on commercial scale a pilot size fluidized bed reactor system was designed and developed and successfully operated. This paper discusses the critical issues related to these activities. (author)
Additional details
Publishing Information
- Publisher
- Bhabha Atomic Research Centre
- Imprint Place
- Mumbai (India)
- ISBN
- 978-81-8372-053-6
- Imprint Title
- Proceedings of the national symposium on growth of detector-grade single crystals
- Imprint Pagination
- 191 p.
- Journal Page Range
- p. 131-132
Conference
- Title
- national symposium on growth of detector-grade single crystals
- Acronym
- NSGDSC-2009
- Dates
- 19-21 Nov 2009
- Place
- Mumbai (India)
INIS
- Country of Publication
- India
- Country of Input or Organization
- India
- INIS RN
- 41022914
- Subject category
- S21: SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DESIGN; FBR TYPE REACTORS; FLUIDIZED BED REACTORS; INTERFERING ELEMENTS; PARTICLE PRODUCTION; SILANES; SILICON
- Descriptors DEC
- BREEDER REACTORS; ELEMENTS; EPITHERMAL REACTORS; FAST REACTORS; FUEL DISPERSION REACTORS; HOMOGENEOUS REACTORS; HYDRIDES; HYDROGEN COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; REACTORS; SEMIMETALS; SILICON COMPOUNDS
Optional Information
- Notes
- 2 refs., 2 figs.