Published 2021 | Version v1
Book Metadata-only

Ion beam lithography: sensitivity and contrast of PMMA resist determination

Creators

  • 1. Inst. of Microelectronic Technology and High Purity Materials RAS, Chernogolovka (Russian Federation)

Description

no abstract available

Part of:
Summaries of reports of 50th International Tulinov conference on physics of interactions of charged particles with crystals (dedicated to the memory of Mikhail Igorevich Panasyuk)

Additional details

Additional titles

Original title (English)
Tezisy dokladov 50-j mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami (pamyati Mikhaila Igorevicha Panasyuka posvyashchaetsya)

Publishing Information

Publisher
KDU, Universitetskaya Kniga
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-91304-958-2
Imprint Title
Summaries of reports of 50th International Tulinov conference on physics of interactions of charged particles with crystals (dedicated to the memory of Mikhail Igorevich Panasyuk)
Imprint Pagination
200 p.
Journal Page Range
p. 138

Conference

Title
50. International Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title
50-ya mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
25-27 May 2021
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
55076433
Subject category
S36: MATERIALS SCIENCE; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
COMPARATIVE EVALUATIONS; COMPUTERIZED SIMULATION; EFFICIENCY; ELECTRON BEAMS; ETCHING; ION BEAMS; MEAN FREE PATH; MICROELECTRONIC CIRCUITS; PMMA; PRINTED CIRCUITS; SENSITIVITY; THEORETICAL DATA
Descriptors DEC
BEAMS; DATA; ELECTRONIC CIRCUITS; ESTERS; EVALUATION; INFORMATION; LEPTON BEAMS; NUMERICAL DATA; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE BEAMS; POLYACRYLATES; POLYMERS; POLYVINYLS; SIMULATION; SURFACE FINISHING

Optional Information

Notes
Imprint:Tezisy dokladov 50-j mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami (pamyati Mikhaila Igorevicha Panasyuka posvyashchaetsya)