Published 1997
| Version v1
Miscellaneous
Investigation on possibility of application thin spin-on glass films and zirconium ceramics in humidity sensors
- 1. Instytut Elektroniki Politechniki Slaskiej, Gliwice (Poland)
Description
The investigation on possibility of application of humidity-sensitive thin films, like phosphorosilicate glass and stabilized zirconium ceramics in construction of humidity sensors, have been carried out. The paper presents the results of initial research of three type humidity sensors; impedance-type with interdigitated electrodes and parallel electrodes and capacitance type. (author)
Additional details
Publishing Information
- Imprint Title
- Proceedings of 21. Conference of the International Society for Hybrid Microelectronics. Poland Chapter
- Imprint Pagination
- 289 p.
- Journal Page Range
- p. 265-267
Conference
- Title
- 21. Conference of the International Society for Hybrid Microelectronics. Poland Chapter
- Dates
- 5-8 Oct 1997
- Place
- Ustron (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 31006870
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- CERAMICS; ELECTRIC CONDUCTIVITY; HUMIDITY CONTROL; MEETINGS; MICROELECTRONICS; PHOSPHORUS COMPOUNDS; SILICATES; SPIN GLASS STATE; THIN FILMS; ZIRCONIUM OXIDES
- Descriptors DEC
- CHALCOGENIDES; CONTROL; ELECTRICAL PROPERTIES; FILMS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SILICON COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS
Optional Information
- Notes
- 7 refs, 4 figs