Published November 2001 | Version v1
Journal article Metadata-only

Hardness measurements in thin ceramic films

Creators

  • 1. RAN, Inst. Fiziko-Khimicheskikh Problem Keramicheskikh Materialov, Moscow (Russian Federation)
  • 2. NSI Tsentr Khimicheskoj Termodinamiki pri Vysokikh Temperaturakh, Rim (Italy)

Description

Methods of hardness determination in thin ceramic films are reviewed on the basis of the results of microindentation of composite film-substrate systems. Considered are different models of the film hardness calculation from the hardness of the composition system. Analysis of the size effect of indentation and its effect on the results of the film hardness evaluation is performed. Experimental data verify the validity of the methods discussed

Abstract (Russian)

Приведен обзор методов определения твердости тонких керамических пленок по результатам микроиндентирования композиционных систем пленка-подложка. Рассмотрены модели расчета твердости пленки из твердости композиционной системы. Дан анализ размерного эффекта индентирования и его влияния на результаты оценок твердости пленок. Приведены экспериментальные данные, подтверждающие применимость обсуждаемых методов

Additional details

Additional titles

Original title (Russian)
Измерение твердости тонких керамических пленок

Publishing Information

Journal Title
Zavodskaya Laboratoriya
Journal Volume
67
Journal Issue
11
Journal Page Range
p. 42-47
ISSN
0321-4265
CODEN
ZVDLAU

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
34010538
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
CERAMICS; HARDNESS; MATERIALS TESTING; NIOBIUM NITRIDES; REFRACTORIES; SUBSTRATES; THIN FILMS; TITANIUM CARBIDES; ZIRCONIUM NITRIDES
Descriptors DEC
CARBIDES; CARBON COMPOUNDS; FILMS; MECHANICAL PROPERTIES; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; REFRACTORY METAL COMPOUNDS; TESTING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS

Optional Information

Notes
34 refs., 4 figs., 1 tab.