Published March 1978 | Version v1
Journal article Metadata-only

Auger electron spectroscopy - Fundamentals - Experiments - Applications

Creators

  • 1. CEA Centre d'Etudes Nucleaires de Saclay, 91 - Gif-sur-Yvette (France). Service de Chimie-Physique

Description

Auger Electron Spectroscopy is now 25 years old and routine spectrometer can analyse (sub) microscopic sample area. This paper summarizes the main theoretical and experimental points needed to understand the use of a high spatial and energy resolution system. Limitations of the method due to the electron beam damage or due to the sensivity threshold are evaluated

Abstract (French)

La spectroscopie des electrons Auger a maintenant 25 ans, un spectrometre de routine peut analyser des surfaces d'echantillons sub-microscopiques. On resume les principaux points theoriques et experimentaux necessaires pour comprendre l'utilisation d'un systeme a haut pouvoir de resolution spatiale et energetique. On evalue les limitations de la methode dues au dommage cause par le faisceau d'electrons ou au seuil de sensibilite

Additional details

Additional titles

Original title (French)
Spectroscopie des electrons Auger. Principes generaux - Experimentation - Applications

Publishing Information

Journal Title
Vide. Couches Minces
Journal Volume
33
Journal Issue
191
Series
Vide. Couches Minces.
Journal Page Range
58-68

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
10462715
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
AUGER ELECTRON SPECTROSCOPY; REVIEWS
Descriptors DEC
DOCUMENT TYPES; ELECTRON SPECTROSCOPY; SPECTROSCOPY