Published April 1978 | Version v1
Journal article Metadata-only

Temperature dependence of silicon sputtering coefficient

Creators

  • 1. Minskij Radiotekhnicheskij Inst. (Byelorussian SSR)

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Температурная зависимост' коэффициента распыления кремния

Publishing Information

Journal Title
Fiz. Tverd. Tela
Journal Volume
20
Journal Issue
4
Series
Fiz. Tverd. Tela.
Journal Page Range
1235-1237

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
10474822
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ARGON IONS; BORON ADDITIONS; ENERGY DEPENDENCE; EV RANGE; HIGH TEMPERATURE; MONOCRYSTALS; SILICON; SPUTTERING; TEMPERATURE DEPENDENCE
Descriptors DEC
CHARGED PARTICLES; CRYSTALS; ELEMENTS; ENERGY RANGE; IONS; SEMIMETALS

Optional Information

Notes
Short note; for English translation see the journal Sov. Phys. - Solid State.