Published June 1989
| Version v1
Journal article
American Vacuum Society, National Symposium, 35th, Atlanta, GA, Oct. 2-7, 1988, Proceedings. Parts 1 ampersand 2
Creators
Description
The conference presents papers on electronic materials, plasma science, thin films, applied surface science, surface science, vacuum metallurgy, vacuum technology, and joint sessions. Particular attention is given to plasma processing, strained-layer superlattices, semiconductor surfaces and interfaces, and metalorganic molecular-beam epitaxy growth. Other topics include electronic materials interfaces, metal-semiconductor interfaces, diagnostics for plasma processes, plasma materials interactions, plasma enhanced chemical vapor deposition and processing, and inertial confinement fusion target technology
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology, A
- Journal Volume
- 7 vp.
- Series
- J. Vac. Sci. Technol., A.
- ISSN
- 0734-2101
- CODEN
- JVTAD
Conference
- Title
- 35. national vacuum symposium.
- Dates
- 2-7 Oct 1988.
- Place
- Atlanta, GA (USA).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 21019996
- Subject category
- S42: ENGINEERING; S36: MATERIALS SCIENCE; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; ELECTRONIC EQUIPMENT; INERTIAL CONFINEMENT; INTERACTIONS; INTERFACES; MEETINGS; METALLURGY; PLASMA; PLASMA ARC SPRAYING; PLASMA DIAGNOSTICS; RADIATION DETECTORS; SEMICONDUCTOR DEVICES; SOLAR CELLS; SOLID STATE PHYSICS; SPUTTERING; SUPERLATTICES; TARGETS; THERMONUCLEAR REACTIONS; THIN FILMS
- Descriptors DEC
- CHEMICAL COATING; CONFINEMENT; DEPOSITION; DIRECT ENERGY CONVERTERS; EQUIPMENT; FILMS; MEASURING INSTRUMENTS; NUCLEAR REACTIONS; NUCLEOSYNTHESIS; PHYSICS; PLASMA CONFINEMENT; SPRAY COATING; SURFACE COATING; SYNTHESIS
Optional Information
- Secondary number(s)
- CONF-881002--.