Published March 2013
| Version v1
Journal article
Composition, XRD and morphology study of laser prepared LiNbO3 films
Creators
- 1. Czech Technical University in Prague, Faculty of Biomedical Engineering, Sitna, Kladno (Czech Republic)
- 2. Institute of Physics ASCR v.v.i., Prague 8 (Czech Republic)
- 3. Nuclear Physics Institute ASCR, Rez near Prague (Czech Republic)
- 4. International Laser Centre, Bratislava 4 (Slovakia)
- 5. Institute of Chemical Technology, Prague 6 (Czech Republic)
Description
LiNbO3 films were deposited by PLD from LiNbO3 crystalline or from three different stoichiometric or Li-enriched LiNbO3 targets. Polycrystalline films were prepared on SiO2/Si or sapphire substrates at temperatures TS ∝650-750 C. Main attention was paid to the influence of targets preparation and the deposition conditions on films composition, morphology and crystallinity. The thin-film morphology was determined by SEM microscopy. The composition was measured by SIMS, RBS, PIXE and PIGE methods. Highly oriented, smooth and stoichiometric LiNbO3 films were synthesized. (orig.)
Availability note (English)
Available from: http://dx.doi.org/10.1007/s00339-012-7191-0Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics. A, Materials Science and Processing
- Journal Volume
- 110
- Journal Issue
- 4
- Series
- Special issue on laser ablation: Creation of nanomaterials and PLD
- Journal Page Range
- p. 883-888
- ISSN
- 0947-8396
- CODEN
- APAMFC
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 44045746
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABSORPTION SPECTRA; CHEMICAL COMPOSITION; CRYSTAL GROWTH; DEPOSITION; LASER RADIATION; LITHIUM COMPOUNDS; NIOBATES; OPACITY; ORIENTATION; POLYCRYSTALS; PULSED IRRADIATION; ROUGHNESS; SCANNING ELECTRON MICROSCOPY; TEMPERATURE RANGE 0400-1000 K; TEMPERATURE RANGE 1000-4000 K; THICKNESS; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALI METAL COMPOUNDS; COHERENT SCATTERING; CRYSTALS; DIFFRACTION; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; FILMS; IRRADIATION; MICROSCOPY; NIOBIUM COMPOUNDS; OPTICAL PROPERTIES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATIONS; REFRACTORY METAL COMPOUNDS; SCATTERING; SPECTRA; SURFACE PROPERTIES; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS