Published 2004 | Version v1
Journal article Metadata-only

Positronium annihilation lifetime spectroscopy of porous low-k films with periodic pore structures

Creators

  • 1. Photonics Research Inst., National Inst. of Advanced Industrial Science and Technology, (AIST), Ibaraki (Japan)
  • 2. Central Technology Lab., Asahi Kasei Co., Shizuoka (Japan)
  • 3. Analysis and Simulation Center, Asahi Kasei Co. Shizuoka (Japan)

Description

Positronium-annihilation lifetime spectroscopy (PALS) with an energy-variable pulsed positron beam is used to measure pore size and pore interconnectivity in porous methyl-silsesquioxane (MSQ) films with periodic pore structures. The results obtained for the films with different k values (1.9-2.3) suggest that with increasing porosity the pore structure changes from isolated spheres to connected long cylinders. Comparison between the pore sizes obtained by PALS and TEM is also presented. (orig.)

Additional details

Publishing Information

Journal Title
Materials Science Forum
Journal Volume
445-446
Journal Page Range
p. 334-336
ISSN
0255-5476
CODEN
MSFOEP

Conference

Title
13. International conference on positron annihilation - ICPA-13
Dates
Sep 2003
Place
Kyoto (Japan)

INIS

Country of Publication
Switzerland
Country of Input or Organization
Switzerland
INIS RN
35050703
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNIHILATION; FILMS; LIFETIME; PARTICLE SIZE; PORE STRUCTURE; POROUS MATERIALS; POSITRON COLLISIONS; POSITRONIUM; SILOXANES; TRANSMISSION ELECTRON MICROSCOPY
Descriptors DEC
COLLISIONS; ELECTRON MICROSCOPY; INTERACTIONS; MATERIALS; MICROSCOPY; MICROSTRUCTURE; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; PARTICLE INTERACTIONS; SIZE