Published September 2017
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Formation of thin silicon coatings by magnetron sputtering method
- 1. Belarusian state university, Minsk (Belarus)
- 2. Kazan federal university, Kazan (Russian Federation)
Description
The surface morphology and optical properties of Si coatings formed by magnetron sputtering were studied using atomic force microscopy and spectrophotometry methods. It has been found that the magnetron sputtering technological parameters (substrate temperature and bias potential) influence on the morphology of the silicon coatings surface (filamentous structures and/or round holes appearance) and on the coefficients minima and maxima reflectance and transmittance spectra location. (authors)
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Additional details
Additional titles
- Original title (Russian)
- Формирование оптически-прозрачных кремниевых покрытий методом магнетронного распыления
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 978-985-553-446-5
- Imprint Title
- Interaction of radiation with solids. Proceedings of 12. International conference
- Imprint Pagination
- 483 p.
- Journal Page Range
- p. 329-330
- Report number
- INIS-BY--103
Conference
- Title
- 12. International conference 'Interaction of radiation with solids'
- Original Conference Title
- 12. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 19-22 Sep 2017
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 50011286
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; MAGNETRONS; OPACITY; OPTICAL PROPERTIES; SILICON; SPECTROPHOTOMETRY; SPUTTERING; SURFACE COATING; SURFACE PROPERTIES; THIN FILMS
- Descriptors DEC
- DEPOSITION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; SEMIMETALS
Optional Information
- Notes
- 2 refs., 1 tab., 2 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 12. Mezhdunarodnoj konferentsii