TiN coating and pre-baking of beam ducts for SuperKEKB
Creators
- 1. High Energy Accelerator Research Organization (KEK), Tsukuba, Ibaraki (Japan)
Description
More than 1200 beam ducts in the SuperKEKB project required TiN coating on the internal surface to mitigate electron cloud effects and pre-baking before installation. To perform baking and TiN coating of many ducts, dedicated facilities were constructed at the KEKB Oho Laboratory. The coating facility has 5 vertical coating equipment systems for straight ducts and 3 horizontal systems for bent ducts. The thickness of TiN coating is about 200 nm by Ti sputtering in Argon and Nitrogen gases. The baking facility has 4 baking equipment systems and a hot-air heating method is employed. The targeted pressure after baking is below 1×10-7 Pa. Since the fall of 2012, these facilities have been in full-scale operation. A 10-person team is assigned for this task, and about 740 beam ducts were coated and baked so far. (author)
Additional details
Identifiers
Publishing Information
- Imprint Title
- Proceedings of the 10th annual meeting of Particle Accelerator Society of Japan
- Imprint Pagination
- [1123 p.]
- Journal Page Range
- [5 p.]
Conference
- Title
- 10. annual meeting of Particle Accelerator Society of Japan
- Dates
- 2-6 Aug 2013
- Place
- Nagoya, Aichi (Japan)
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 46110321
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- B MESONS; BAKING; COLLIDING BEAMS; CONTAINERS; ELECTRONS; JAPANESE ORGANIZATIONS; PARTICLE PRODUCTION; POSITRONS; STORAGE RINGS; SURFACE COATING; TITANIUM NITRATES; VACUUM SYSTEMS
- Descriptors DEC
- ANTILEPTONS; ANTIMATTER; ANTIPARTICLES; BEAMS; BEAUTY MESONS; BEAUTY PARTICLES; BOSONS; DEPOSITION; ELEMENTARY PARTICLES; FERMIONS; HADRONS; HEATING; LEPTONS; MATTER; MESONS; NATIONAL ORGANIZATIONS; NITRATES; NITROGEN COMPOUNDS; OXYGEN COMPOUNDS; PSEUDOSCALAR MESONS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- 10 refs., 12 figs.