Published 2013 | Version v1
Miscellaneous

TiN coating and pre-baking of beam ducts for SuperKEKB

  • 1. High Energy Accelerator Research Organization (KEK), Tsukuba, Ibaraki (Japan)

Description

More than 1200 beam ducts in the SuperKEKB project required TiN coating on the internal surface to mitigate electron cloud effects and pre-baking before installation. To perform baking and TiN coating of many ducts, dedicated facilities were constructed at the KEKB Oho Laboratory. The coating facility has 5 vertical coating equipment systems for straight ducts and 3 horizontal systems for bent ducts. The thickness of TiN coating is about 200 nm by Ti sputtering in Argon and Nitrogen gases. The baking facility has 4 baking equipment systems and a hot-air heating method is employed. The targeted pressure after baking is below 1×10-7 Pa. Since the fall of 2012, these facilities have been in full-scale operation. A 10-person team is assigned for this task, and about 740 beam ducts were coated and baked so far. (author)

Part of:
Proceedings of the 10th annual meeting of Particle Accelerator Society of Japan

Additional details

Publishing Information

Imprint Title
Proceedings of the 10th annual meeting of Particle Accelerator Society of Japan
Imprint Pagination
[1123 p.]
Journal Page Range
[5 p.]

Conference

Title
10. annual meeting of Particle Accelerator Society of Japan
Dates
2-6 Aug 2013
Place
Nagoya, Aichi (Japan)

Optional Information

Notes
10 refs., 12 figs.