Nano-sized Si3N4 reinforced NiFe nanocomposites by electroplating

Permalloy NiFe/Si3N4 nanocomposite layers were electroplated on a copper substrate. The volume fraction of nano-sized Si3N4 particles in NiFe matrix was controlled by the addition of various percentages of Si3N4 particles in the NiFe electrolyte. The nanocomposite layers of up to 400 μm were analyzed by a scanning electron microscopy (SEM). Microhardness test was performed. With nano-sized Si3N4 particles in the NiFe matrix, the microhardness of NiFe was improved. The samples were then annealed at 800 deg. C for about 20 h. The microhardness declined more with more Si3N4 particles in the NiFe matrix. The analysis result from energy dispersive spectrometer (EDS) in the SEM showed that the hardness declination could be caused by the segregation of Si3N4 in the NiFe matrix. Finally, this paper presents nanocomposite micromolds fabricated by electroplating onto polymer molds that were fabricated by micro-stereolithgraphy