Published October 2003 | Version v1
Journal article Metadata-only

In situ plasma diagnostics study by means of optical emission spectroscopy for diamond chemical vapor deposition under high gravity conditions

Creators

  • 1. Politecnico di Torino, C.so Duca degli Abruzzi 24, I-10129 Torino (Italy)
  • 2. National Institute of Advance Industrial Science of Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8586 (Japan)

Description

A complete optical spectroscopy apparatus has been developed on board of a high gravity chemical vapor deposition facility. The article describes in detail the experimental apparatus and its main features. Preliminary results concern in situ plasma diagnostics under various gravity conditions up to 75g. The developed diagnostic apparatus is found to be a convenient tool for systematic in situ investigation of the influence of high gravity on the plasma composition. Thus, it is an effective means to clarify the most relevant active species playing a role during diamond film growth under high gravity conditions

Additional details

Identifiers

DOI
10.1063/1.1610783;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
74
Journal Issue
10
Journal Page Range
p. 4458-4461
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36005621
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
CHEMICAL VAPOR DEPOSITION; DIAMONDS; EMISSION SPECTROSCOPY; FILMS; GRAVITATION; PLASMA DIAGNOSTICS
Descriptors DEC
CARBON; CHEMICAL COATING; DEPOSITION; ELEMENTS; MINERALS; NONMETALS; SPECTROSCOPY; SURFACE COATING

Optional Information

Notes
(c) 2003 American Institute of Physics.