Published August 1993
| Version v1
Journal article
Physical and tribological properties of a-Si1-xCx:H coatings prepared by r.f. plama-assisted chemical vapour deposition
- 1. Materials Div., Vlaamse Instelling voor Technologisch Onderzoek (VITO), Mol (Belgium)
Description
A-Si1-xCx:H films deposited by r.f. plasma-assisted chemical vapour deposition were studied as a function of their composition. The friction and wear properties were investigated with the help of a conventional ball-on-disc apparatus. These results are correlated with chemical (Si/C atomic ratio) and structural (Raman and infrared spectroscopy) properties. The friction coefficient in a humid ambient atmosphere changes markedly with the carbon fraction and reaches a value as low as 0.05 for coatings with 70 to 90 at.% C. The carbon-rich films consist of diamond-like carbon with silicon. (orig.)
Additional details
Publishing Information
- Journal Title
- Journal de Physique 4. Colloque
- Journal Volume
- 3
- Journal Issue
- 3
- Journal Page Range
- p. 503-510.
- ISSN
- 1155-4339
- CODEN
- JPICEI
Conference
- Title
- 9. international conference on chemical vapour deposition (Euro CVD-9).
- Dates
- 22-27 Aug 1993.
- Place
- Tampere (Finland).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 25021251
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CARBON; CHEMICAL COMPOSITION; COATINGS; ENVIRONMENTAL EFFECTS; FILMS; FRICTION; GLOW DISCHARGES; HUMIDITY; HYDROGEN ADDITIONS; INFRARED SPECTRA; MICROSTRUCTURE; RAMAN SPECTRA; REFRACTIVE INDEX; SILICON; SILICON CARBIDES; THIN FILMS; TRIBOLOGY; WEAR
- Descriptors DEC
- CARBIDES; CARBON COMPOUNDS; CRYSTAL STRUCTURE; ELECTRIC DISCHARGES; ELEMENTS; MOISTURE; NONMETALS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; SEMIMETALS; SILICON COMPOUNDS; SPECTRA