Published 2000 | Version v1
Book

Probe Diagnostics of Diffused Ar/SF6 Plasma

  • 1. Department of Systems Engineering, Nagoya Institute of Technology, Nagoya (Japan)

Description

no abstract available

Part of:
24 International Conference on Phenomena in Ionized Gases Proceedings - Vol. 1

Additional details

Publishing Information

Publisher
Printing Division, Space Research Center, Polish Academy of Sciences, Warsaw, Poland
Imprint Place
Warsaw (Poland)
ISBN
83-902319-5-6
Imprint Title
24 International Conference on Phenomena in Ionized Gases Proceedings - Vol. 2
Imprint Pagination
230 p.
Journal Page Range
p. 41-42

Conference

Title
24 International Conference on Phenomena in Ionized Gases
Dates
11-16 Jul 1999
Place
Warsaw (Poland)

Optional Information

Notes
7 refs, 5 figs