Published March 1994
| Version v1
Journal article
Optical properties of Ta2O5 films, obtained ny the method of reactive sputtering
- 1. Donetskij Gosudarstvennyj Univ., Donetsk (Ukraine)
Description
Short communication
Additional details
Additional titles
- Original title (Russian)
- Оптические свойства пленок Ta...
Publishing Information
- Journal Title
- Neorganicheskie Materialy
- Journal Volume
- 30
- Journal Issue
- 3
- Journal Page Range
- p. 429-430.
- ISSN
- 0002-337X
- CODEN
- NEOMB8
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 26052347
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ANTIREFLECTION COATINGS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SPRAYED COATINGS; SPUTTERING; SUBSTRATES; TANTALUM OXIDES; THIN FILMS
- Descriptors DEC
- CHALCOGENIDES; COATINGS; FILMS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS