Published 1995
| Version v1
Miscellaneous
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Ion beam assisted deposition of ZrO2 thin films
- 1. Technische Univ. Darmstadt (Germany)
- 2. Heidelberg Univ. (Germany). Inst. fuer Angewandte Physikalische Chemie
Description
Short communication
Files
28072038.pdf
Files
(20.2 kB)
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Additional details
Publishing Information
- Publisher
- Accademic Press.
- Imprint Title
- Ninth international conference on ion beam modification of materials. Book of abstracts
- Imprint Pagination
- 452 p.
- Journal Page Range
- p. 4059.
- Report number
- INIS-AU--0004
Conference
- Title
- 9. international conference on ion beam modification of materials.
- Acronym
- IBMM'95
- Dates
- 5-10 Feb 1995.
- Place
- Canberra (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28072038
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ARGON IONS; CARBON; IRRADIATION; KEV RANGE 01-10; MICROSTRUCTURE; ORDER-DISORDER TRANSFORMATIONS; PHYSICAL RADIATION EFFECTS; SILICON; STRUCTURAL CHEMICAL ANALYSIS; THIN FILMS; ZIRCONIUM OXIDES
- Descriptors DEC
- CHALCOGENIDES; CHARGED PARTICLES; CRYSTAL STRUCTURE; ELEMENTS; ENERGY RANGE; FILMS; IONS; KEV RANGE; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; RADIATION EFFECTS; SEMIMETALS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS