Published May 19, 2003 | Version v1
Journal article Metadata-only

Er3+ photoluminescence from Er-doped amorphous SiOx films prepared by pulsed laser deposition at room temperature: The effects of oxygen concentration

Creators

  • 1. Department of Nano Science and Technology, University of Seoul, Seoul (Korea, Republic of)
  • 2. Department of Physics, Kyunghee University, Seoul (Korea, Republic of)
  • 3. Department of Chemistry, Kyunghee University, Seoul (Korea, Republic of)
  • 4. Department of Chemical and Biological Engineering, Korea University, Seoul (Korea, Republic of)

Description

We have fabricated Er-doped amorphous SiOx films by laser ablation of a Si:Er2O3 target in He atmosphere. The photoluminescence intensity at 1.54 μm was highly dependent on the oxygen content in the film, which turned out to be changed significantly by the ambient He pressure. Also, we have adopted time-of-flight quadrupole mass spectroscopy to obtain kinetic energies of ionic species in a plume produced by laser ablation. Si and Er ions do not overlap spatially as they expand toward the Si substrate and Er ions impinge on the preformed SiOx layer

Additional details

Identifiers

DOI
10.1063/1.1573335;

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
82
Journal Issue
20
Journal Page Range
p. 3436-3438
ISSN
0003-6951
CODEN
APPLAB

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
35037700
Subject category
S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
ABUNDANCE; AMORPHOUS STATE; CHEMICAL ANALYSIS; DEPOSITION; ERBIUM; LASERS; MASS SPECTROSCOPY; OXYGEN; PHOTOLUMINESCENCE; SILICON OXIDES; STOICHIOMETRY; SUBSTRATES; THIN FILMS; TIME-OF-FLIGHT MASS SPECTROMETERS
Descriptors DEC
CHALCOGENIDES; DYNAMIC MASS SPECTROMETERS; ELEMENTS; EMISSION; FILMS; LUMINESCENCE; MASS SPECTROMETERS; MEASURING INSTRUMENTS; METALS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; RARE EARTHS; SILICON COMPOUNDS; SPECTROMETERS; SPECTROSCOPY; TIME-OF-FLIGHT SPECTROMETERS

Optional Information

Notes
(c) 2003 American Institute of Physics.