Published 2008 | Version v1
Journal article

Structural, optical, and electrical characterizations of epitaxial lifted-off InGaAs/InAlAs metamorphic heterostructures bonded on AlN ceramic substrates

  • 1. Center for Nano Materials and Technology, Japan Advanced Institute of Science and Technology (JAIST) 1-1 Asahidai, Nomi-shi, Ishikawa (Japan)

Description

We investigated epitaxial lift-off (ELO) of In0.57Ga0.43As/In0.56Al0.44As metamorphic high electron mobility heterostructures and their van der Waals bonding (VWB) on AlN ceramic substrates. Structural, optical, and electrical characterizations were carried out for samples obtained by ELO and VWB, in comparison with on-wafer counterparts before ELO. We confirmed a strain release after ELO and VWB from X-ray diffraction, and observed a consequent photoluminescence energy shift. The ELO samples exhibit very high electron mobilities owing to the high indium contents and successful ELO and VWB processes. (copyright 2008 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

Availability note (English)

Available from: http://dx.doi.org/10.1002/pssc.200779267

Additional details

Identifiers

Publishing Information

Journal Title
Physica Status Solidi. C, Conferences
Journal Volume
5
Journal Issue
9
Journal Page Range
p. 2787-2790
ISSN
1610-1634

Conference

Title
34. International symposium on compound semiconductors (ISCS-2007)
Dates
15-18 Oct 2007
Place
Kyoto (Japan)

Optional Information

Notes
With 5 figs., 9 refs.. SICI: 1610-1634(200807)5:9<2787::AID-PSSC200779267>3.0.TX;2-W